JPS6233313Y2 - - Google Patents

Info

Publication number
JPS6233313Y2
JPS6233313Y2 JP1981027502U JP2750281U JPS6233313Y2 JP S6233313 Y2 JPS6233313 Y2 JP S6233313Y2 JP 1981027502 U JP1981027502 U JP 1981027502U JP 2750281 U JP2750281 U JP 2750281U JP S6233313 Y2 JPS6233313 Y2 JP S6233313Y2
Authority
JP
Japan
Prior art keywords
bellows
suction
box
wafer
suction plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981027502U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57142840U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981027502U priority Critical patent/JPS6233313Y2/ja
Publication of JPS57142840U publication Critical patent/JPS57142840U/ja
Application granted granted Critical
Publication of JPS6233313Y2 publication Critical patent/JPS6233313Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Details Of Cutting Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP1981027502U 1981-03-02 1981-03-02 Expired JPS6233313Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981027502U JPS6233313Y2 (en]) 1981-03-02 1981-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981027502U JPS6233313Y2 (en]) 1981-03-02 1981-03-02

Publications (2)

Publication Number Publication Date
JPS57142840U JPS57142840U (en]) 1982-09-07
JPS6233313Y2 true JPS6233313Y2 (en]) 1987-08-26

Family

ID=29825202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981027502U Expired JPS6233313Y2 (en]) 1981-03-02 1981-03-02

Country Status (1)

Country Link
JP (1) JPS6233313Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569637B2 (ja) * 1987-11-30 1997-01-08 三菱マテリアル株式会社 吸着盤

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49132684A (en]) * 1973-04-25 1974-12-19
DE2528734C3 (de) * 1975-06-27 1978-09-14 Hoechst Ag, 6000 Frankfurt Präparationsmittel für das Texturieren von Polyesterfasern

Also Published As

Publication number Publication date
JPS57142840U (en]) 1982-09-07

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